SFM Medical Digital Flow Meters

Sensirion SFM Medical Digital Flow Meters are designed to measure the flow rate of air, oxygen, and other non-aggressive gases with excellent accuracy. These flow meters offer a low-pressure drop with a small dead space. Sensirion SFM Medical Digital Flow Meters deliver ultra-fast update times with high sensitivity. These flow meters offer a bidirectional flow range of -100 standard liters per minute (SLM) to ±250SLM. They feature medical cones for pneumatic connection to standard breathing circuits and a mechanical interface for easy and reliable electrical reconnections. These meters are based on CMOSens® technology, which combines a thermal sensor element, signal processing, and digital calibration on a single microchip for fast signal processing. SFM meters are specifically designed for medical applications such as respiratory, ventilation, anesthesia, and metabolic instruments.

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Description Datasheet Availability Pricing (IDR) Filter the results in the table by unit price based on your quantity.
Qty. RoHS ECAD Model Type
Sensor Type
For Use With
Range
Accuracy
Output Voltage
Operation Mode
Operating Supply Voltage
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Housing Material
Sensirion Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris
Datasheet
15In Stock
Min.: 1
Mult.: 1

Gas Flow Meter Oxygen 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors
Datasheet
15In Stock
71On Order
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Disposable Single Use Version
Datasheet
1.568In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors
Datasheet
4In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -30slm to +300slm
Datasheet
37In Stock
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 2.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital Airflow sensor
Datasheet
12In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 100 slm to 250 slm 7 % Bidirectional 5 V 26 mm Plastic
Sensirion Flow Sensors -100 slm to +250 slm (bi-directional)Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version
Datasheet
14In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases - 100 slm to 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Sensor device
Datasheet
39In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Air, Non-Aggressive Gases 20 slm 3 % Bidirectional 5 V to 9 V 6.25 mm Polyamide (PA)
Sensirion Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Legris
Datasheet
23In Stock
Min.: 1
Mult.: 1

Gas Flow Meter Carbon Dioxide 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 0.5 slm - 0.0005 slm.
Datasheet
2In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 0.5 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 50 sccm - 0.05 sccm.
Datasheet
4In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 50 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital Airflow sensor
Datasheet
Product Comments
14In Stock
20Expected 16/12/2026
Min.: 1
Mult.: 1

Digital Flow Meter Digital Mass Flow Meter Air, Oxygen -10 slm to 240 slm 3 % Unidirectional 2.7 V to 5.5 V Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -10slm to +240slm
Datasheet
26In Stock
90On Order
Min.: 1
Mult.: 1

Low Pressure Drop Digital Flow Meter Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 10 slm to 240 slm 2.5 % Bidirectional 3.3 V 19 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version
Datasheet
43In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Singe use Airflow sensor
Datasheet
239In Stock
270Expected 25/11/2026
Min.: 1
Mult.: 1

Flow Meter Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 33 slm to 33 slm 10 % Bidirectional 5 V 15.6 mm, 17.8 mm Silicon
Sensirion Flow Sensors 33slm (bidirectional) Digital Flow Meter for Neonatal/Pediatric Medical Applications - Autoclavable & cleanable Version
Datasheet
15In Stock
90On Order
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 33 slm 3 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 2 slm - 0.002 slm.
Datasheet
2In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 2 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -150slm to +300slm
Datasheet
9In Stock
40Expected 25/11/2026
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen -150 slm to 300 slm 2.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Robust Digital (Mass) Flow Meter with range of -30slm to +300slm
Datasheet
5In Stock
20Expected 07/10/2026
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 3.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 10 slm - 0.01 slm.
Datasheet
4On Order
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 10 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors
Datasheet
11On Order
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors Digital Mass Flow Meter -30slm to +300slm, robust with Heliox calibration
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 3.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Mass Flow Meter Sensor for Respiratory Applications
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 30
Mult.: 30

Mass Air Flow Sensor Air, Oxygen, Non-Aggressive Gases - 24 slm to 240 slm 2.5 % 2.4 V Bidirectional 5 V 14 mm
Sensirion Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 40
Mult.: 40

Gas Flow Meter Air, Non-Aggressive Gases 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 40
Mult.: 40