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D6F Series MEMS Flow Sensors

Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Image	Part #	Mfr.	Description	Datasheet	Availability	Pricing (IDR) Filter the results in the table by unit price based on your quantity.	Qty.	Type	For Use With	Range	Accuracy	Output Voltage	Operating Supply Voltage	Port Size	Housing Material
Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term D6F-P0001A1 Omron Electronics 1: Rp1.028.844 315In Stock	Mfr. Part No. D6F-P0001A1 Mouser Part No 653-D6F-P0001A1	Omron Electronics	Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	315In Stock	Rp1.028.844 Rp921.703 Rp921.153 Rp875.838 View Rp851.071 Rp848.136 Quote	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 0.1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec D6F-V03A1 Omron Electronics 1: Rp424.893 602In Stock	Mfr. Part No. D6F-V03A1 Mouser Part No 653-D6F-V03A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec Learn More about Omron Electronics omron d6f v mems flow sensor	Datasheet	602In Stock	Rp424.893 Rp403.429 Rp382.881 Rp361.967 View Rp349.308 Rp341.052 Rp329.311 Quote	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 3 m/s	10 %	0 V to 2 V	3.15 V to 9.45 V	2 mm x 3 mm	Thermoplastic (TP)
Flow Sensors MEMS Airflow Sensor Air 0-10 LPM D6F-10A61-000 Omron Electronics 1: Rp4.903.702 27In Stock	Mfr. Part No. D6F-10A61-000 Mouser Part No 653-D6F-10A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-10 LPM Learn More about Omron Electronics omrond6fp	Datasheet	27In Stock	Rp4.903.702 Rp4.581.547 Rp4.348.919 Rp4.223.249	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-50A7D-000-0 Omron Electronics 1: Rp4.107.119 8In Stock	Mfr. Part No. D6F-50A7D-000-0 Mouser Part No 653-D6F-50A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	8In Stock	Rp4.107.119 Rp3.621.500 Rp3.621.317 Rp3.502.985 View Rp3.458.771 Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 50 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter D6F-P0010A1 Omron Electronics 1: Rp1.070.306 1.061In Stock 2.375On Order	Mfr. Part No. D6F-P0010A1 Mouser Part No 653-D6F-P0010A1	Omron Electronics	Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	1.061In Stock 2.375On Order On Order Ship Dates Mfr. No: D6F-P0010A1 Stock: 1.061 Can Dispatch Immediately On Order: 1.075 Expected 30/10/2026 1.300 Expected 01/01/2027 Factory Lead Time: 26 Weeks	Rp1.070.306 Rp989.216 Rp951.424 Rp913.631 View Rp900.605 Rp899.137	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min			4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec D6F-W04A1 Omron Electronics 1: Rp1.712.232 278In Stock	Mfr. Part No. D6F-W04A1 Mouser Part No 653-D6F-W04A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	278In Stock	Rp1.712.232 Rp1.588.580 Rp1.542.348 Rp1.487.127 Rp1.463.644	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 4 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 D6F-CABLE2 Omron Electronics 1: Rp197.586 311In Stock	Mfr. Part No. D6F-CABLE2 Mouser Part No 653-D6F-CABLE2	Omron Electronics	Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 Learn More about Omron Electronics omrond6fp	Datasheet	311In Stock	Rp197.586 Rp178.874 Rp171.902 Rp163.646 View Rp157.959 Rp153.006 Rp142.365 Rp138.329	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Mass Flow Sensor D6F-03A3-000			1 V to 5 V
Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto D6F-P0010A2 Omron Electronics 1: Rp1.098.742 234In Stock 325Expected 06/11/2026	Mfr. Part No. D6F-P0010A2 Mouser Part No 653-D6F-P0010A2	Omron Electronics	Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	234In Stock 325Expected 06/11/2026	Rp1.098.742 Rp1.014.534 Rp970.136 Rp908.310 Rp899.137	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min		0 V to 3.1 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Flow Sensor Manifold Mount D6F-P0010AM2 Omron Electronics 1: Rp1.161.485 93In Stock	Mfr. Part No. D6F-P0010AM2 Mouser Part No 653-D6F-P0010AM2	Omron Electronics	Flow Sensors MEMS Flow Sensor Manifold Mount Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	93In Stock	Rp1.161.485 Rp1.049.024 Rp997.472 Rp946.287 View Rp922.620 Rp904.825 Quote	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec D6F-W01A1 Omron Electronics 1: Rp1.716.085 147In Stock	Mfr. Part No. D6F-W01A1 Mouser Part No 653-D6F-W01A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	147In Stock	Rp1.716.085 Rp1.591.882 Rp1.529.323 Rp1.490.613 Rp1.463.644	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 1 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor 10m/sec D6F-W10A1 Omron Electronics 1: Rp1.719.571 60In Stock	Mfr. Part No. D6F-W10A1 Mouser Part No 653-D6F-W10A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor 10m/sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	60In Stock	Rp1.719.571 Rp1.595.185 Rp1.526.754 Rp1.493.548 Rp1.463.644	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 10 m/s	5 %	6 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS air 0-10L/min D6F-10A5-000 Omron Electronics 1: Rp4.826.099 4In Stock 5Expected 30/10/2026	Mfr. Part No. D6F-10A5-000 Mouser Part No 653-D6F-10A5-000	Omron Electronics	Flow Sensors MEMS air 0-10L/min Learn More about Omron Electronics omrond6fp	Datasheet	4In Stock 5Expected 30/10/2026	Rp4.826.099 Rp4.523.573 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-20A6-000 Omron Electronics 1: Rp5.759.360 2In Stock 35Expected 30/10/2026	Mfr. Part No. D6F-20A6-000 Mouser Part No 653-D6F-20A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	2In Stock 35Expected 30/10/2026	Rp5.759.360 Rp4.523.757 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Airflow Sensor Air 0-20 LPM D6F-20A61-000 Omron Electronics 1: Rp5.115.782 2In Stock 2Expected 22/12/2026	Mfr. Part No. D6F-20A61-000 Mouser Part No 653-D6F-20A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-20 LPM Learn More about Omron Electronics omrond6fp	Datasheet	2In Stock 2Expected 22/12/2026	Rp5.115.782 Rp4.795.094 Rp4.649.427 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-20A7D-000-0 Omron Electronics 1: Rp3.481.704 6In Stock	Mfr. Part No. D6F-20A7D-000-0 Mouser Part No 653-D6F-20A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	6In Stock	Rp3.481.704 Rp3.387.405 Rp3.307.784 Rp3.286.319 View Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 20 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors Cable for D6F-P MEMS Flow Sensors D6F-CABLE1 Omron Electronics 1: Rp191.899 79In Stock 102Expected 06/11/2026	Mfr. Part No. D6F-CABLE1 Mouser Part No 653-D6F-CABLE1	Omron Electronics	Flow Sensors Cable for D6F-P MEMS Flow Sensors Learn More about Omron Electronics omrond6fp	Datasheet	79In Stock 102Expected 06/11/2026	Rp191.899 Rp178.874 Rp171.902 Rp163.646 View Rp157.959 Rp151.538 Rp146.768 Rp140.714 Rp138.329	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Flow Sensors CABLE FOR D6F D6F-CABLE3 Omron Electronics 1: Rp197.586 39In Stock	Mfr. Part No. D6F-CABLE3 Mouser Part No 653-D6F-CABLE3	Omron Electronics	Flow Sensors CABLE FOR D6F Learn More about Omron Electronics omrond6fp	Datasheet	39In Stock	Rp197.586 Rp178.874 Rp171.902 Rp161.628 View Rp157.959 Rp143.649 Rp141.448 Rp135.210	Min.: 1 Mult.: 1	Accessory, Cable	MEMS Flow Sensor
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-10A6-000 Omron Electronics 1: Rp5.120.552 43Expected 20/11/2026	Mfr. Part No. D6F-10A6-000 Mouser Part No 653-D6F-10A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	43Expected 20/11/2026	Rp5.120.552 Rp4.799.681 Rp4.588.702 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS FLOW SENSOR D6F-10A7D-000-0 Omron Electronics 1: Rp4.107.119 10On Order	Mfr. Part No. D6F-10A7D-000-0 Mouser Part No 653-D6F-10A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	10On Order	Rp4.107.119 Rp3.774.690	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 10 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-50A6-000 Omron Electronics 1: Rp5.115.599 8Expected 27/11/2026	Mfr. Part No. D6F-50A6-000 Mouser Part No 653-D6F-50A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	8Expected 27/11/2026	Rp5.115.599 Rp4.795.094 Rp4.586.683 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Micro-Flow Sensor D6F-05N7-000 Omron Electronics 1: Rp5.339.787 Non-Stocked Lead-Time 28 Weeks	Mfr. Part No. D6F-05N7-000 Mouser Part No 653-D6F-05N7-000	Omron Electronics	Flow Sensors MEMS Micro-Flow Sensor Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 28 Weeks	Rp5.339.787 Rp4.786.471	Min.: 1 Mult.: 1	Micro-Flow Sensor	City Gas	0 L/min to 5 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V
Flow Sensors MEMS air 0-50L/min D6F-50A5-000 Omron Electronics 1: Rp5.115.782 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-50A5-000 Mouser Part No 653-D6F-50A5-000	Omron Electronics	Flow Sensors MEMS air 0-50L/min Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 26 Weeks	Rp5.115.782 Rp4.795.094 Rp4.586.683 Rp4.490.734	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors FLOW SENSOR D6F-50A61-000 Omron Electronics 1: Rp4.938.009 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-50A61-000 Mouser Part No 653-D6F-50A61-000	Omron Electronics	Flow Sensors FLOW SENSOR	Datasheet	Non-Stocked Lead-Time 26 Weeks	Rp4.938.009 Rp4.690.155	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min
Flow Sensors MEMS FLOW SENSOR D6F-70AB71D-000-0 Omron Electronics 1: Rp4.353.506 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-70AB71D-000-0 Mouser Part No 653-D6F-70AB71D-0000	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	Non-Stocked Lead-Time 26 Weeks	Rp4.353.506 Rp4.074.280 Rp3.774.690	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 70 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors D6FZ-FGT Mntg Bracket Omron Automation and Safety D6FZ-FC03 D6FZ-FC03 Omron Automation and Safety 1: Rp1.051.409 Non-Stocked	Mfr. Part No. D6FZ-FC03 Mouser Part No 653-D6FZ-FC03	Omron Automation and Safety	Flow Sensors D6FZ-FGT Mntg Bracket	Datasheet	Non-Stocked	Rp1.051.409 Rp906.109 Rp856.391 Rp798.968 View Rp755.855 Rp736.042	Min.: 1 Mult.: 1

D6F Series MEMS Flow Sensors

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