Sensirion SFM3013 Digital Mass Flow Meters
Sensirion SFM3013 Digital Mass Flow Meters are versatile, bidirectional flow meters with low pressure drop and superior stability against overpressure. These next-generation flow meters feature robustness to overpressure (up to 1 bar gauge pressure) and are calibrated for air, oxygen, and air/oxygen mixtures. This series can also be calibrated for heliox gas mixtures as an option. The SFM3013 meters utilize Sensirion's patented CMOSens® technology, which combines a thermal sensor element, signal processing, and digital calibration on a single microchip for fast signal processing. Sensirion SFM3013 Digital Mass Flow Meters are ideal for a variety of medical and industrial applications, including ventilation, anesthesia, inhalers, spectroscopy, and more.
Features
- Flow range up to 300SLM
- Calibrated for O2, air, and mixtures thereof; can be calibrated for heliox gas mixtures as an option
- I2C interface
- Low pressure drop across the sensor
- No recalibration needed
- Up to 1 bar gauge pressure
- CMOSens technology
- High reliability and long-term stability
- Industry-proven technology
- Designed for mass production
- High process capability
- Scalability
Applications
- Medical ventilation: inspiratory flow measurements
- Anesthesia, inhalers, and other medical instruments
- Process automation
- Burner control
- Fuel cell control
- Spectroscopy
- Environment monitoring
- Laboratory/analytical instruments
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